Built from the same silicon as transistors, MEMS has had a transformative impact on electronics.

As the twenty-first century approaches, the capacity to shrink electronic devices while multiplying their capabilities has profoundly changed both technology and society. Beginning in 1948, the vacuum ...

Electrostatic dynamics in microelectromechanical systems (MEMS) encompasses the interplay between electric fields and mechanical structures at the microscale. Central to this field is the generation ...

Electrostatic microelectromechanical systems (MEMS) integrate mechanical structures with electrical actuation at micron scales, enabling precision sensors, actuators and resonators. Mathematical ...

If you’ve ever wondered what lies beneath the barely visible hole in the can of a MEMS microphone, you’re in luck, because [Zach Tong] has a $10 pair of earbuds to sacrifice for the cause and an ...

Researchers are developing a new class of tiny mechanical devices containing vibrating, hair-thin structures that could be used to filter electronic signals in cell phones and for other more exotic ...

Introduction to microelectromechanical devices with an emphasis on their manufacturing and mechanical behavior. Material properties, microfabrication technology, mechanical behavior of of ...

A cutting-edge design platform for microelectromechanical systems (MEMS) now allows engineers to simultaneously optimize mechanical and electronic components using a genetic algorithm. By introducing ...

Microelectromechanical systems (MEMS) feature moving and electronic components on the micrometer scale. Product development teams, researchers, and others have become particularly interested in ...